Semiconductor chip manufacturing is among the most technically demanding and tightly regulated industries worldwide. As device architecture evolves toward greater integration and finer line widths, the role of high-purity electronic gases becomes increasingly critical. Consistent gas purity, supply stability, and process compatibility are essential to achieving optimal yield and maintaining production reliability at every node. Messer is one of the earliest professional companies to enter the electronic gas industry in China. With global expertise and strong localization capabilities, we are dedicated to supplying qualified gases to semiconductor customers, along with providing fully integrated solutions, from gas system design, construction, and delivery to ongoing operation and maintenance support. To date, Messer has supported multiple domestic 12-inch and 8-inch wafer production lines in China and has established stable partnerships with customers in areas such as advanced packaging, power devices, and specialized processes, earning recognition as a trusted long-term partner.
Messer offers stable and high-purity electronic gases with over 60 product types, meeting the demanding requirements of next-gen semiconductor manufacturing.
• Ultra-high purity gases: O₂, N₂, Ar, H₂, He, Electronic Grade CO₂
• Oxidizing agents: N₂O, SiH₄, O₂/Ar, C₂H₄, C₃H₆ mixtures
• Laser gases: Excimer laser mixtures for 248nm KrF(Kr/Ne, F₂/Kr/Ne)、193nm ArF (Ar/Xe/Ne, F₂/Ar/Ne)
• Etching gases: CF₄, SF₆, CHF₃, C₄F₈, CH₂F₂, CH₃F, C₄F₆, CO
• Doping gases: PH₃ mixtures, AsH₃, B₂H₆ mixtures, GeH₄ mixtures
• Cleaning gases: NF₃, SF₆, 20%F₂/N₂
• Deposition gases: SiH₄ mixtures, BCl₃ mixtures, and a variety of customized ultra-pure gas blends